[We-P] Poster Presentation

[We-P-12] Review and detail classification of stacking faults in 4H-SiC epitaxial layer by mirror projection electron microscopy

*Kentaro Ohira¹, Toshiyuki Isshiki², Hideki Sako^2,3, Masaki Hasegawa¹, Kenji Kobayashi¹, Katsunori Onuki¹ (1. Hitachi High-Technologies Corp.(Japan), 2. Kyoto Institute of Technology(Japan), 3. Toray Research Center Inc.(Japan))