[We-P] Poster Presentation

[We-P-14] 4H-SiC Epi-ready Substrate Qualification by Using Mirror Electron Microscope Inspection System

*Masaki Hasegawa¹, Kentaro Ohira¹, Noriyuki Kaneoka¹, Tomohiko Ogata¹, Katsunori Onuki¹, Kenji Kobayashi¹, Tsutomu Osanai², Keiko Masumoto², Junji Senzaki² (1. Hitachi High-Technologies Corp.(Japan), 2. National Inst. of Advanced Industrial Science and Technology(Japan))