[We-P] Poster Presentation

[We-P-27] Characterization of Surface Potential of Oxidized Silicon Carbide by a Laser Terahertz Emission Microscope

*Tatsuhiko Nishimura¹, Hidetoshi Nakanishi¹, Iwao Kawayama², Masayoshi Tonouchi², Takuji Hosoi³, Takayoshi Shimura³, Heiji Watanabe³ (1. SCREEN Holdings Co., Ltd.(Japan), 2. Inst. of Laser Eng., Osaka Univ.(Japan), 3. Graduate School of Eng., Osaka Univ.(Japan))