ICSCRM2019

Presentation information

Poster Presentation

Poster Presentation

[We-P] Poster Presentation

Wed. Oct 2, 2019 4:15 PM - 6:15 PM Annex Hall 1 (Kyoto International Conference Center)

4:15 PM - 6:15 PM

[We-P-32] Laser Annealing of P and Al implanted 4H-SiC epitaxial layers

*Cristiano Calabretta1,2, Massimo Zimbone1, Simona Boninelli1, Marta Agati1, Alessandro Pecora1, Andrea Castiello1, Guglielmo Fortunato1, Lucia Calcagno3, Lorenzo Torrisi2, Francesco La Via1 (1. CNR-IMM (Italy), 2. Messina Univ.(Italy), 3. Catania Univ.(Italy))