[We-P] Poster Presentation

[We-P-32] Laser Annealing of P and Al implanted 4H-SiC epitaxial layers

*Cristiano Calabretta^1,2, Massimo Zimbone¹, Simona Boninelli¹, Marta Agati¹, Alessandro Pecora¹, Andrea Castiello¹, Guglielmo Fortunato¹, Lucia Calcagno³, Lorenzo Torrisi², Francesco La Via¹ (1. CNR-IMM (Italy), 2. Messina Univ.(Italy), 3. Catania Univ.(Italy))