[We-P] Poster Presentation

[We-P-33] Room Temperature Processing of Low Resistance Contacts to p-type 4H-SiC using Laser Doping

Kento Okamoto¹, *Akihiro Ikeda², Toshifumi Kikuchi¹, Hiroshi Ikenoue¹, Tanemasa Asano¹ (1. Kyushu Univ.(Japan), 2. Sojo Univ.(Japan))