[We-P] Poster Presentation

[We-P-38] Influence of Aluminum Compensation Effects in 4H-SiC on the Performance of VDMOS Transistors

*Holger Schlichting¹, Matthias Kocher¹, Julietta Weisse², Tobias Erlbacher^1,2, Anton J. Bauer¹ (1. Fraunhofer Inst. IISB(Germany), 2. Friedrich-Alexander Univ.(Germany))