2:05 PM - 2:25 PM
[AMD7-3] Highly Stable High Mobility Top-gate Structured Oxide TFT by Supplying Optimized Oxygen and Hydrogen to Semiconductors
Keywords:High mobility, Stability, Top-gate structure, oxide TFTs
Top-gate self-aligned structured TFT is appropriate for the high-end display. However, it is hard to realize highly stable high mobility characteristics, because GI deposition affects active surface in top-gate structure. Here we realize highly stable high mobility oxide TFTs by using thermal-ALD and oxygen sourcing plasma treatment for GI process.