The 26th International Display Workshops (IDW '19)

講演情報

Oral Presentation

[FLX2] Stretchable and Flexbile Devices

2019年11月28日(木) 17:20 〜 18:30 Mid-sized Hall B (1F)

Chair: Manabu Ito (Toppan Printing Co.)
Co-Chair: Mitsuru Nakata (NHK)

18:10 〜 18:30

[FLX2-3] Study on Top-Gate Self-Aligned InGaZnO TFTs on PI Substrate

*Nian Liu1, Huafei Xie2, Macai Lu1, Xueru Mei1, Lei Wen1, Shujhih Chen1, Shengdong Zhang2, Chiayu Lee1, Xin Zhang1 (1. Shenzhen China Star Optoelectronics Semiconductor Display Technology Co.Ltd., China (China), 2. School of Electronic and Computer Engineering, Peking University, Shenzhen, China (China))

キーワード:IGZO, Flexible Display, Polyimide, Thin-Film Transistor, Micro LED

We discussed the effect of polyimide substrate on TFTs, the water from polyimide diffused into IGZO which deteriorated device characteristic. By reducing hydrogen content in GI we optimized device characteristic, and GI 1step deposition is more stable. Finally, we did the static bending and dynamic test, TFTs keep good stability.