[FMC2] Metrology and Manufacturing

[FMC2-3] Researches of Process Reduction for Viewing Angle Controllable LCD

*Shih-Bin Liu¹, Lujie Wang¹, Jun Jiang¹, Yanbing Qiao¹, Chia-Te Liao¹, Te-Chen Chung¹ (1. InfoVision Optoelectronics (Kunshan) Co., Ltd. (China))

キーワード：mask reduction, half-tone mask, product process, LCD

In this paper, a better condition is found to maintain the thickness of PR for half-tone technology, and some issues of process reduction in B-ITO and M3 layers are solved. These issues of topology for M3 after ashing and last wet etching are still being studied.