[FMC4/LCT4] Micro LED Display

[FMC4/LCT4-3(Invited)] Monolithic Integration of GaN-micro-LED and Si-MOSFET for Bio-application

*Hiroto Sekiguchi^1,2, Hiroki Yasunaga¹, Kazuaki Tsuchiyama¹, Keisuke Yamane¹, Hiroshi Okada¹, Akihiro Wakahara¹ (1. Toyohashi University of Technology (Japan), 2. PRESTO, JST (Japan))

Keywords:MicroLED, Optogenetics, GaN, wafer bonding

A micro light-emitting diodes (LED) has been attention as an optical stimulation tool for optogenetics. In this study, a needle-type microLED probe was fabricated for neuroscience. In addition, the monolithic integration of microLED and Si-MOSFET using wafer bonding technique was challenged toward the realization of multifunctional devices.