[FMCp3] Metrology & Manufacturing

[FMCp3-2] Reliability Improvement of Narrow Down-border TED Product Based on LTPS-TFT LCD Technology

*Binbin Chen¹, Zuoyin Li¹, Haitao Duan¹, Guozhao Chen¹, Junyi Li¹, Lei Wang¹ (1. Xiamen Tianma Microelectronics Co., Ltd. (China))

キーワード：TED, Metal corrosion, Potential difference, Full-screen-display

We analyzed the failure route of metal corrosion and solved this issue by improving the coverage effect of passivation film on metal line. Otherwise, electrochemical corrosion mechanism was carried out to explain the failure mechanism and low potential difference metal was proposed to decrease the defective rate to 0.