[FMCp3] Metrology & Manufacturing

[FMCp3-7] Mechanical Exfoliated Large Scale CVD-Graphene using Water-Soluble WO3 Supporting Layer

*Seung-Il Kim¹, Seok Ki Hyeong¹, Ji Yun Moon¹, Jae-Hyun Lee¹ (1. Ajou University (Korea))

キーワード：Chemical Vapor Deposition, Mechanical Exfoliation, Graphene, Tungsten Oxide

We will introduce a large area clean graphene transfer method that solves the problems encountered during the transfer process of CVD graphene. WO₃ can transfer high-quality graphene synthesized on a Ge substrate without a defect, and there is no chemical etching process due to its water-soluble nature.