[FMCp5] Materials & Components

[FMCp5-6L] Transparent Conductive Ga-Al-ZnO Film Fabricated by Facing Targets Sputtering System

*Kyung Hwan Kim¹, Yu Jin Kim¹, You Seung Rim², Jeongsoo Hong¹ (1. Gachon University (Korea), 2. Sejong University (Korea))

キーワード：FTS, GAZO, Trnasparent electrode

Ga and Al doped ZnO thin films were fabricated by facing targets sputtering system with various deposition conditions including input current, oxygen atmosphere and thermal treatment temperature. In this study, we investigated the change of electrical, optical and structural properties by fabrication conditions.