[MEET1] Novel Materials, Fundamental Components and Process Technologies

[MEET1-1(Invited)] High Brightness Electron Beam with Carbon Nanotube (CNT) Cold Cathode

*Kyu Chang Park¹, Ha Rim Lee¹, Boklae Cho² (1. KyungHee University (Korea), 2. Korea Research Institute for Science and Standard (Korea))

キーワード：Carbon nanotube (CNT), Cold Cathode, high brightness

We fabricated high brightness electron beam with carbon nanotube (CNT) cold cathode. The beam brightness strongly depends on the virtual source size of CNT cold cathode. Based on the beam brightness simulation and measurement, we could obtain micro-focused electron beam with higher electron emission current for large area, high resolution imaging.