[MEET5] Micro/NanoDisplays and Nanotechnology Application (1)

[MEET5-4(Invited)] Towards High Resolution Active-Matrix GaN μ-LED Based Micro Displays

Junyang Nie^2,1, Zhijie Ke³, Yongai Zhang¹, Xiongtu Zhou¹, Tailiang Guo¹, Congyan Lu⁵, Yiren Chen⁵, Zhangxu Pan⁶, Ling Li⁴, Di Geng⁴, Hang Song⁵, Zheng Gong⁶, *Jie Sun¹, Qun Yan^1,2 (1. Fuzhou University (China), 2. Xi'an Jiaotong University (China), 3. Xiamen Changelight Co. Ltd. (China), 4. Institute of Microelectronics, Chinese Academy of Sciences (China), 5. Changchun Institute of Optics ,Fine Mechanics and Physics,Chinese Academy of Science, China (China), 6. Guangdong Institute of Semiconductor Industry Technology, Guangdong Academy of Sciences (China))

キーワード：Micro LED, μ-LED, Micro display, active-matrix, 2D material

We focus on the design/fabrication of active matrix 0.55 inch 1323 ppi micro displays based on GaN μ-LED arrays with Si CMOS driver prepared by flip-chip bonding. The process is optimized for manufacturing. A pioneer work of integrating 2D material transistors with GaN μ-LEDs is also discussed.