The 26th International Display Workshops (IDW '19)

講演情報

Oral Presentation

[OLED2] OLED Material

2019年11月27日(水) 15:20 〜 16:40 Room 204 (2F)

Chair: Takahiro Komatsu (JOLED)
Co-Chair: Hitoshi Kuma (Idemitsu Kosan)

16:20 〜 16:40

[OLED2-4] Ellipsometry, XRR, and GCIB-TOF-SIMS Analysis of Small Molecule Layers in Solution Process and Vacuum Deposition Process

*Takahiro Shibamori1, Sachiko Kojima1, Aki Suzuki1, Yusaku Tanahashi1, Takashi Miyamoto1 (1. Toray Research Center, Inc. (Japan))

キーワード:solution process, deposition process, organic light emitting diodes, time-of-flight secondary ion mass spectrometry, gas cluster ion beam

Ellipsometry, XRR, and GCIB-TOF-SIMS are applied to investigation of the spin-coating process as comparison of spin-coated samples and vacuum evaporated samples. The residual solvent of spin-coating process was observed in spin-coated samples by GCIB-TOF-SIMS. The result suggested that it can cause the decrease of refractive index observed in ellipsometry.