10:40 AM - 1:10 PM
[OLEDp1-7] A Study of Encapsulation Structure for TFT Reliability in Top Emission OLED Display
Keywords:encapsulation, oxide, hydrogen, multilayer
Preventing hydrogen and water vapor from permeating through encapsulation layer plays an important role in TFT Reliability. To improve a blocking characteristic, encapsulation inorganic layers were studied. A SiNx and SiO2 multilayered inorganic deposition method for OLED has been developed to obtain a reliable performance.