[OLEDp1] OLED poster

[OLEDp1-7] A Study of Encapsulation Structure for TFT Reliability in Top Emission OLED Display

*Jae Young Oh¹, Seung Hee Nam¹, Kwon-Shik Park¹, SooYoung Yoon¹, InByeong Kang¹, Jae Kyeong Jeong² (1. LG Display (Korea), 2. Hanyang University (Korea))

キーワード：encapsulation, oxide, hydrogen, multilayer

Preventing hydrogen and water vapor from permeating through encapsulation layer plays an important role in TFT Reliability. To improve a blocking characteristic, encapsulation inorganic layers were studied. A SiN_x and SiO₂ multilayered inorganic deposition method for OLED has been developed to obtain a reliable performance.