International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 28 (IDW '21)

Proceedings of the International Display Workshops Volume 28 (IDW '21)

Dec 1, 2021 - Dec 3, 2021
Virtual Conference

3:40 PM - 4:00 PM

[FMC2-2(Invited)] Feasibility of Low-Cost Micro-LED Manufacturing with Sputtering

*Hiroshi Fujioka1, Kohei Ueno1, Atsushi Kobayashi1 (1.The University of Tokyo (Japan))

InGaN LEDs, micro-LEDdisplays, sputtering, RGB LEDs, tunneling contacts

https://doi.org/10.36463/idw.2021.0213

We have fabricated RGB InGaN LEDs on low cost substrate such as glass or metal foils by sputtering to investigate the feasibility of Low-Cost Micro-LED Manufacturing. We have also fabricated cascade LED structures with the use of p+n+ tunneling contacts to simplify the fabrication process of micro-LED displays.