10:40 AM - 11:10 AM
[6-5] Impact of SiON tunnel layer composition on 3D NAND cell performance
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Oral Presentation
Wed. May 15, 2019 8:30 AM - 11:10 AM IMW2019
Session Chairs: Antonio Arreghini, IMEC, Tomoya Sanuki, Toshiba Memory
10:40 AM - 11:10 AM
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