[TuP] Poster

[TuP-11] Hydrogen cleaning for high-quality conductive AlInN/GaN DBRs

*Kana Shibata¹, Tsuyoshi Nagasawa¹, Tetsuya Takeuchi¹, Satoshi Kamiyama¹, Motoaki Iwaya¹ (1. Meijo Univ. (Japan))

Presentation style: On-site (in-person)

キーワード：VCSEL, DBR, AlInN/GaN