Session information

Oral Presentation

6.Applied Research and Industrial Applications

Oral Session AP1

Wed. Jul 3, 2024 9:00 AM - 10:20 AM Room O (Science Hall)

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9:00 AM - 9:40 AM

[AP1-01] (Keynote) Evolution of interconnect metallurgy and future roadmap

*Takeshi Nogami¹ (1. IBM Research)

9:40 AM - 10:00 AM

[AP1-02] Sputter epitaxy of atomically flat Zn_1-xMg_xO films on sapphire using 3D buffer layers fabricated at high deposition rate

*Hiroki Otsuyama¹, Kotaro Yataka¹, Takafumi Yunoue¹, Naoto Yamashita¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Kazunori Koga¹, Masaharu Shiratani¹, Naho Itagaki¹ (1. Graduate School of Information Science and Electrical Engineering, Kyushu University)

10:00 AM - 10:20 AM

[AP1-03] Piezoelectric single-crystal PZT thin films epitaxially grown on Si substrate with oxide buffer layer

*Osamu Nakagawara¹ (1. I-PEX Piezo Solutions Inc.)

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