10:40 〜 11:10
*Hyeong-U Kim1,2 (1. Department of Plasma Engineering, Korea Institute of Machinery & Materials (KIMM), 2. Department of Nano-mechanics, University of Science and Technology (UST))
Oral Presentation
1.Fundamentals of Sputtering and Plasma Processes
2024年7月3日(水) 10:40 〜 12:30 Room O (Science Hall)
10:40 〜 11:10
*Hyeong-U Kim1,2 (1. Department of Plasma Engineering, Korea Institute of Machinery & Materials (KIMM), 2. Department of Nano-mechanics, University of Science and Technology (UST))
11:10 〜 11:30
*Peter Klein1, Jaroslav Hnilica1, Martin Ondryáš1, Vjačeslav Sochora2, Martin Učík1,3, Ján Klusoň3, Petr Vašina1 (1. Masaryk University, Brno, Czech republic, 2. SHM s. r. o., Šumperk, Czech Republic , 3. PLATIT a.s., Šumperk, Czech Republic )
11:30 〜 11:50
*Daniel Lundin1, Ulf Helmersson1, Martin Cada2, Zdenek Hubicka2 (1. Linköping University, 2. Academy of Science of the Czech Republic)
11:50 〜 12:10
*Thomas Schütte1, Peter Neiß1, Marius Radloff1, Hokuto Kikuchi1 (1. PLASUS GmbH)
12:10 〜 12:30
*Thomas Gilmore1 (1. Impedans Ltd.)
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