Sputter epitaxy of atomically flat Zn<sub>1-x</sub>Mg<sub>x</sub>O films on sapphire using 3D buffer layers fabricated at high deposition rate

Hiroki Otsuyama

9:40 AM - 10:00 AM

[AP1-02] Sputter epitaxy of atomically flat Zn_1-xMg_xO films on sapphire using 3D buffer layers fabricated at high deposition rate

*Hiroki Otsuyama¹, Kotaro Yataka¹, Takafumi Yunoue¹, Naoto Yamashita¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Kazunori Koga¹, Masaharu Shiratani¹, Naho Itagaki¹ (1. Graduate School of Information Science and Electrical Engineering, Kyushu University)

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Presentation information

Oral Session AP1

[AP1-02] Sputter epitaxy of atomically flat Zn_1-xMg_xO films on sapphire using 3D buffer layers fabricated at high deposition rate

Password

Presentation information

Oral Session AP1

[AP1-02] Sputter epitaxy of atomically flat Zn1-xMgxO films on sapphire using 3D buffer layers fabricated at high deposition rate

Password

[AP1-02] Sputter epitaxy of atomically flat Zn_1-xMg_xO films on sapphire using 3D buffer layers fabricated at high deposition rate