Oral Session FA1

[FA1-02] Reactive magnetron sputtering of titanium dioxide films on glass: structural, optical and electrical properties

*Matthieu Michiels^1,2, Axel Hemberg², Yoan Paint², Herman Terryn³, Michel Voué⁴, Arnaud Krumpmann⁵, Stanislava Debnárová⁵, Rony Snyders^5,2, Stephanos Konstantinidis⁵ (1. HEH.be University college, Department of Sciences and technologies, 2. Materia Nova Research Center, 3. Electrochemical and Surface Engineering (SURF), 4. Materials Physics and Optics, University of Mons, 5. Plasma-Surface Interaction Chemistry (ChIPS), Universiy of Mons)