ISSP2024

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Oral Presentation

5.Functional Thin Films and Advanced Coatings

Oral Session FA2

Fri. Jul 5, 2024 10:40 AM - 12:30 PM Room O (Science Hall)

11:10 AM - 11:30 AM

[FA2-02] A study about mechanical properties of Diamond-like carbon films deposited by HiPIMS method

*Yuuki Tokuta1, Yasuyoshi Saito1, Yoshikazu Teranishi1, Taishi Uehara2, Satoru Habuka3, Ryo Sakamoto4, Tomohiro Kato4, Tetsuhide Shimizu4 (1. Tokyo metropolitan industrial technology research institute, 2. DOWA HOLDINGS Co., Ltd., 3. DOWA THERMOTECH Co., Ltd., 4. Tokyo Metropolitan University)

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