Oral Session FA2

[FA2-02] A study about mechanical properties of Diamond-like carbon films deposited by HiPIMS method

*Yuuki Tokuta¹, Yasuyoshi Saito¹, Yoshikazu Teranishi¹, Taishi Uehara², Satoru Habuka³, Ryo Sakamoto⁴, Tomohiro Kato⁴, Tetsuhide Shimizu⁴ (1. Tokyo metropolitan industrial technology research institute, 2. DOWA HOLDINGS Co., Ltd., 3. DOWA THERMOTECH Co., Ltd., 4. Tokyo Metropolitan University)