ISSP2024

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Oral Presentation

1.Fundamentals of Sputtering and Plasma Processes

Oral Session FS1

Wed. Jul 3, 2024 10:40 AM - 12:30 PM Room O (Science Hall)

11:10 AM - 11:30 AM

[FS1-02] Metal ion flux fraction increase for industrial applications

*Peter Klein1, Jaroslav Hnilica1, Martin Ondryáš1, Vjačeslav Sochora2, Martin Učík1,3, Ján Klusoň3, Petr Vašina1 (1. Masaryk University, Brno, Czech republic, 2. SHM s. r. o., Šumperk, Czech Republic , 3. PLATIT a.s., Šumperk, Czech Republic )

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