ISSP2024

Presentation information

Print

Oral Presentation

1.Fundamentals of Sputtering and Plasma Processes

Oral Session FS1

Wed. Jul 3, 2024 10:40 AM - 12:30 PM Room O (Science Hall)

11:50 AM - 12:10 PM

[TH2-03] Continuous pulse-resolved spectroscopic and electrical plasma monitoring in HIPIMS and pulsed sputtering applications

*Thomas Schütte1, Peter Neiß1, Marius Radloff1, Hokuto Kikuchi1 (1. PLASUS GmbH)

Abstract password authentication.
Password is required to view the abstract. Please enter a password to authenticate.

Password