Reactive Process Control in Industrial HiPIMS

Presentation information

Oral Presentation

3.Pulsed Sputtering and HiPIMS

Thu. Jul 4, 2024 9:00 AM - 10:20 AM Room O (Science Hall)

10:00 AM - 10:20 AM

*Johan Böhlmark¹, Jacob Törngren¹, Daniel Lundin^1,2 (1. Ionautics AB, 2. Plasma and Coatings Division, IFM-Materials Physics, Linköping University)

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