ISSP2024

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Oral Presentation

3.Pulsed Sputtering and HiPIMS

Oral Session HP2

Thu. Jul 4, 2024 10:40 AM - 12:30 PM Room O (Science Hall)

10:40 AM - 11:10 AM

[HP2-01] (Invited) New routes towards energy-efficient magnetron sputtering: using metal-ion irradiationion for nanostructure and phase control without external substrate heating

*Grzegorz (Greg) Greczynski1, Lars Hultman1, Ivan Petrov2 (1. Linkoping University, 2. University of Illinois)

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