ISSP2024

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Poster Presentation

Poster Session

Poster Session P3

Wed. Jul 3, 2024 5:40 PM - 7:10 PM Room P (Atrium)

5:40 PM - 7:10 PM

[P3-12] Estimation of plasma-induced damage on Si surfaces using the positron annihilation method

*Junichi Yanagisawa1, Ruiji Shigesada1, Masayoshi Ichimiya1, Takahiko Ban1, Atsushi Kinomura2 (1. The University of Shiga Prefecture, 2. Kyoto University)

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