Poster Session P3

[P3-12] Estimation of plasma-induced damage on Si surfaces using the positron annihilation method

*Junichi Yanagisawa¹, Ruiji Shigesada¹, Masayoshi Ichimiya¹, Takahiko Ban¹, Atsushi Kinomura² (1. The University of Shiga Prefecture, 2. Kyoto University)