Poster Session P3

[P3-23] Low-k Dioxide Layer Synthesized on pristine Si wafer

*Pei-Cheng Jiang¹, Yu-Ting Chow², Cheng-Hsun-Tony Chang³ (1. Department of Mechanical Engineering, Minghsin University of Science and Technology, Hsinchu, Taiwan., 2. Department of Semiconductor and Electro-Optical Technology, Minghsin University of Science and Technology, Hsinchu, Taiwan., 3. Department of Electronic Engineering, Minghsin University of Science and Technology, Hsinchu, Taiwan.)