Formation of AlCrN film by using Filtered Arc Deposition with anode focusing and cathode spot control

Mirano Oneda

5:40 PM - 7:10 PM

[P3-26] Formation of AlCrN film by using Filtered Arc Deposition with anode focusing and cathode spot control

*Mirano Oneda¹, Jumpei Kito¹, Seiya Watanabe¹, Genki Sano¹, Takahiro Bando¹, Hirofumi Takikawa¹, Hiroaki Sugita², Takahiro Hattori², Hiroki Gima² (1. Toyohashi University of Technology, 2. OSG Co., Ltd., Research & Development Center)

Abstract password authentication.
Password is required to view the abstract. Please enter a password to authenticate.

Presentation information

Poster Session P3

[P3-26] Formation of AlCrN film by using Filtered Arc Deposition with anode focusing and cathode spot control

Password