Poster Session P4

[P4-04] Fabrication of cuprous oxide films with high p-type conductivity via superimposed high power impulse magnetron sputtering process

*Sheng-Chi Chen^1,2, Chao-Kuang Wen¹, Yin-Hung Chen¹, Cheng-Hao Tsai, Hui Sun³ (1. Department of Materials Engineering and Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, Taipei 243, Taiwan, 2. College of Engineering and Center for Green Technology, Chang Gung University, Taoyuan 333, Taiwan, 3. School of Space Science and Physics, Shandong University, Weihai 264209, China)