Poster Session P4

[P4-05] Behavior of bi-polar HIPIMS plasma studied using Langmuir probe

*Kam-Hong Chau^1,2, Yoshinobu Kawai^1,3, Jia-Lin Syu¹, Ying-Hung Chen¹, Ju-Liang He¹ (1. Feng Chia University, 2. The Hong Kong Polytechnic University, 3. Kyushu University)