Poster Session P4

[P4-07] Effect of acetylene gas flow rates on the phase, microstructural, and mechanical properties of AlCrNbSiTiC high entropy carbide thin films

*Tsai Hsiang Yu¹, Yang Yung Chin¹, Li Chia Lin², Lou Bih Show^3,4, Lee Jyh Wei^2,5,6,7 (1. Department of Materials and Mineral Resources Engineering, Institute of Materials Science and Engineering, National Taipei University of Technology, Taipei, Taiwan, 2. Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei, Taiwan, 3. Chemistry Division, Center for General Education, Chang Gung University, Taoyuan, Taiwan, 4. Department of Orthopaedic Surgery, New Taipei Municipal TuCheng Hospital, Chang Gung Memorial Hospital, Taiwan, 5. Department of Materials Engineering, Ming Chi University of Technology, New Taipei, Taiwan, 6. College of Engineering, Chang Gung University, Taoyuan, Taiwan, 7. High Entropy Materials Center, National Tsing Hua University, Hsinchu, Taiwan)