Formation of sputter-deposited multicomponent (TiNbZrTa)Nx nanoparticles by using high-power pulsed hollow cathode sputtering

Keiichi Takizawa

5:40 PM - 7:10 PM

[P4-14] Formation of sputter-deposited multicomponent (TiNbZrTa)Nx nanoparticles by using high-power pulsed hollow cathode sputtering

*Keiichi Takizawa¹, Kosei Kikuchi¹, Robert Boyd², Rommel Paulo Viloan², Sebastian Ekeroth², Ulf Helmersson², Tetsuhide Shimizu¹ (1. Tokyo Metropolitan University, Tokyo, Japan, 2. Linköping University, Linköping, Sweden)

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Presentation information

Poster Session P4

[P4-14] Formation of sputter-deposited multicomponent (TiNbZrTa)Nx nanoparticles by using high-power pulsed hollow cathode sputtering

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