Poster Session P4

[P4-14] Formation of sputter-deposited multicomponent (TiNbZrTa)Nx nanoparticles by using high-power pulsed hollow cathode sputtering

*Keiichi Takizawa¹, Kosei Kikuchi¹, Robert Boyd², Rommel Paulo Viloan², Sebastian Ekeroth², Ulf Helmersson², Tetsuhide Shimizu¹ (1. Tokyo Metropolitan University, Tokyo, Japan, 2. Linköping University, Linköping, Sweden)