ISSP2024

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Poster Presentation

Poster Session

Poster Session P4

Thu. Jul 4, 2024 5:40 PM - 7:10 PM Room P (Atrium)

5:40 PM - 7:10 PM

[P4-16] Growth of high crystalline single domain orientation of AlN
films epitaxy on Si(111) by High Power Impulse Magnetron
Sputtering

*Wei-Chun Chen1, Katsunori Itagaki 2, Wei-Lin Wang1, Chao-Te Lee1, Akira Kodama 2, Stanley Chen2 (1. Taiwan Instrument Research Institute, National Applied Research Laboratories, 2. Showa precision Co., LTD.)

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