Poster Session P4

[P4-16] Growth of high crystalline single domain orientation of AlN
films epitaxy on Si(111) by High Power Impulse Magnetron
Sputtering

*Wei-Chun Chen¹, Katsunori Itagaki ², Wei-Lin Wang¹, Chao-Te Lee¹, Akira Kodama ², Stanley Chen² (1. Taiwan Instrument Research Institute, National Applied Research Laboratories, 2. Showa precision Co., LTD.)