Fabrication and Characterization of Al Nanohole Arrays Using Electron Beam Lithography with Character Projection

Keisuke Ikeda

5:40 PM - 7:10 PM

[P4-27] Fabrication and Characterization of Al Nanohole Arrays Using Electron Beam Lithography with Character Projection

*Keisuke Ikeda¹, Takayuki Kiba¹, Midori Kawamura¹, Akio Higo² (1. Kitami Institute of Technology, 2. System Design Lab, School of Engineering, The University of Tokyo)

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Presentation information

Poster Session P4

[P4-27] Fabrication and Characterization of Al Nanohole Arrays Using Electron Beam Lithography with Character Projection

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