[P4-29] Structure of low refractive index TiO2 optical thin films prepared by combining electron beam deposition and sputtering
Kosuke Endo1, *Koshiro Sasaki1, Hiroshi Murotani1, Takayuki Matsudaira2(1. Course of Electrical and Electronic Eng., Grad. School of Engineering, Tokai University, 2. Shincron Co., Ltd)