Sputtering deposition of low resistive ZnO:Al films on ZnON seed layers for transparent conducting electrodes

Yoshiharu Wada

5:40 PM - 7:10 PM

[P4-31] Sputtering deposition of low resistive ZnO:Al films on ZnON seed layers for transparent conducting electrodes

*Yoshiharu Wada¹, Zhiyuan Shen¹, Hisato Yabuta¹, Naoto Yamashita¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Kazunori Koga¹, Masaharu Shiratani¹, Naho Itagaki¹ (1. Kyushu-University)

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Presentation information

Poster Session P4

[P4-31] Sputtering deposition of low resistive ZnO:Al films on ZnON seed layers for transparent conducting electrodes

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