Nitridation Processes of Ti Films for Non-Evaporable Getter Coating

Presentation information

Poster Presentation

Poster Session

Fri. Jul 5, 2024 12:40 PM - 2:40 PM Room P (Atrium)

12:40 PM - 2:40 PM

*Takuya Ohba¹, Takeo Nakano¹, Md. Suruz Mian¹, Yuka Fujii¹, Kazuhiro Mase^2,3, Takashi Kikuchi² (1. Seikei Univ., 2. KEK, 3. SOUKENDAI)

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