Effect of pulse frequency on DLC deposition using high-power pulsed magnetron sputtering

Presentation information

Poster Presentation

Poster Session

Fri. Jul 5, 2024 12:40 PM - 2:40 PM Room P (Atrium)

12:40 PM - 2:40 PM

*Shiro Matsumoto¹, Akinori Oda², Hiroyuki Kousaka³, Takayuki Ohta¹ (1. Meijo University, 2. Chiba Institute of Technology, 3. Gifu University)

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