Effect of selective ion acceleration with synchronized substrate bias on the stress reduction of diamond-like carbon films

Ryo Sakamoto

12:40 PM - 2:40 PM

[P5-16] Effect of selective ion acceleration with synchronized substrate bias on the stress reduction of diamond-like carbon films

*Ryo Sakamoto¹, Tomonori Kato¹, Yuuki Tokuta², Satoru Habuka³, Daniel Lundin⁴, Tetsuhide Shimizu¹ (1. Tokyo Metropolitan University, 2. Tokyo Metropolitan Industrial Technology Research Institute, 3. DOWA THERMOTECH Co., Ltd., 4. Linköping University)

Abstract password authentication.
Password is required to view the abstract. Please enter a password to authenticate.

Presentation information

Poster Session P5

[P5-16] Effect of selective ion acceleration with synchronized substrate bias on the stress reduction of diamond-like carbon films

Password