Poster Session P5

[P5-16] Effect of selective ion acceleration with synchronized substrate bias on the stress reduction of diamond-like carbon films

*Ryo Sakamoto¹, Tomonori Kato¹, Yuuki Tokuta², Satoru Habuka³, Daniel Lundin⁴, Tetsuhide Shimizu¹ (1. Tokyo Metropolitan University, 2. Tokyo Metropolitan Industrial Technology Research Institute, 3. DOWA THERMOTECH Co., Ltd., 4. Linköping University)